CONTROL MODULE FOR ION IMPLANTATION DEVICE Russian patent published in 2017 - IPC H01J37/32 

FIELD: electricity.

SUBSTANCE: invention relates to a control module for an ion implantation device having a power supply source and containing: electric generator (HT) with a grounded positive pole; the first switch (SW1), the first pole of which is connected to the negative pole of the said generator (HT) and the second pole of which is connected to output connector (S) of the power supply source; and the second switch (SW2), the first pole of which is connected with the said output connector (S) and the second pole of which is connected with neutralizing connector (N). Control module also includes amperometric circuit (AMP) for measuring bias current flowing between the second pole of the said second switch (SW2) and the said neutralizing connector (N).

EFFECT: higher accuracy of determining the dose of implanted atoms.

10 cl, 4 dwg