FIELD: machine building.
SUBSTANCE: unit cylindrical vacuum chamber 1 has loading door 11 equipped with flange joints for mounting of process modules 4, 5, 6, 7, 8. Unit Incorporates gas feed system, exhaust system supply sources and control unit. Besides, it comprises rotary mount for parts to be processed. Unit process modules may be composed of at least one elongated vacuum-arc generator of metal plasma, elongated generator of gas plasma, medium-frequency dual magnetron, metal ion source and gas ion source. Besides, it comprises shift voltage source to support ion implantation and/or coat deposition.
EFFECT: complex surface processing including surface purification and activation, application of various coats, modification of surface by metal and gas plasma.
17 cl, 2 dwg, 1 tbl, 1 ex
| Title | Year | Author | Number |
|---|---|---|---|
| INSTALLATION FOR COMBINED ION-PLASMA TREATMENT | 2009 |
|
RU2425173C2 |
| INSTALLATION FOR ION-PLASMA MODIFICATION AND COATING THE MONO-WHEELS WITH BLADES | 2017 |
|
RU2661162C1 |
| COMPLEX ION-PLASMA PROCESSING UNIT | 2010 |
|
RU2453629C2 |
| PLANT FOR VACUUM ION-PLASMA TREATMENT OF LONG COMPONENTS | 2010 |
|
RU2450083C2 |
| APPARATUS FOR APPLYING ION-PLASMA COATINGS | 2019 |
|
RU2710809C1 |
| METHOD FOR APPLICATION OF ION-PLASMA COATINGS AND INSTALLATION FOR ITS REALISATION | 2008 |
|
RU2380456C1 |
| METHOD OF SYNTHESIS OF TiN-Cu COMPOSITE COATINGS AND DEVICE FOR ITS IMPLEMENTATION | 2017 |
|
RU2649355C1 |
| APPARATUS FOR APPLYING ION-PLASMA COATINGS ON BLISK BLADES | 2018 |
|
RU2693229C1 |
| METHOD FOR ION-BEAM TREATMENT OF THE INNER SURFACE OF EXTENDED HOLES | 2022 |
|
RU2781774C1 |
| SET FOR DEPOSITION OF COATS | 1992 |
|
RU2061092C1 |
