FIELD: physics, instrumentation.
SUBSTANCE: application for manufacture of thin-film microwave resonators with a Bragg reflector. The invention includes a method for smoothing of an aluminium film surface on dielectric substrate, comprising film spraying onto a substrate by magnetron spraying of aluminium target in vacuum and using yttrium metal, aluminium and yttrium are sprayed in combination, wherein yttrium is evenly distributed over the surface in the aluminium target erosion area, provided that the relation of the total yttrium plates area (SY) to the total aluminium target erosion area (SAl) is 2.0-6.0%, ie γ = SY/SAl = 2.0-6.0%.
EFFECT: invention enables smoothing of aluminium film surface roughness.
4 dwg, 2 tbl
| Title | Year | Author | Number |
|---|---|---|---|
| THIN-FILM FLUORESCENT INDICATOR | 1994 |
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