METHOD OF FORMING A THIN-FILM LUMINOPHORE OF A YTTRIUM-ALUMINIUM GARNET STRUCTURE WITH THE POSSIBILITY OF DOPING WITH RARE-EARTH METALS AS AN IMPURITY (YAlO:RE) Russian patent published in 2025 - IPC C09K11/78 C09K11/80 C30B29/28 C01F17/34 C23C14/08 C23C14/35 

FIELD: chemistry.

SUBSTANCE: invention can be used when forming optical luminiferous coatings for electron-optical converters in night vision devices. First, precursor is deposited on substrate by magnetron sputtering using simultaneously operating at frequencies below 100 kHz three mid-frequency magnetron sputtering systems with single-component targets from aluminium, yttrium and rare-earth metal at power of 1.5 kW, 1.8 kW and 150 W, respectively. Simultaneously, molecular oxygen is fed into the deposition zone, after which its molecules undergo dissociation and ionisation using a high-frequency inductive plasma generator. Then, deposited precursor is subjected to high-temperature annealing in air medium at 1200 °C for 6 hours.

EFFECT: possibility of forming a thin-film luminophore of the composition of yttrium-aluminium garnet, doped with ions of rare-earth metals, with a thickness of the order of the electron free path with energies used in modern night vision devices (4-10 keV); manufacturability and scalability are ensured by high rate of precursor deposition.

1 cl, 2 dwg