FIELD: chemistry.
SUBSTANCE: electrolyte for anodic oxidation of semiconductor compounds on the basis of AIIIBV includes orthophosphoric acid and glycerin. Additionally, the electrolyte contains acetic acid at the following component ratio, wt %: orthophosphoric acid 1-20; acetic acid 46-57; glycerin is the rest.
EFFECT: electrolyte allows anodic oxidation of the surface of semiconductors AIIIBV with preservation of the integrity of the protective mask from the photoresist.
| Title | Year | Author | Number |
|---|---|---|---|
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SU1840204A1 |
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SU1840206A1 |
| 0 |
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SU555174A1 | |
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SU876802A1 |
| 0 |
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SU553699A1 | |
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RU2782989C1 |
