FIELD: microelectronics.
SUBSTANCE: proposed electrolyte that can be widely used in manufacturing MIS devices has ammonium persulfate, glycerin, carbon tetrachloride, and dimethyl formamide; in addition, electrolyte incorporates water. Proportion of ingredients is as follows, mass percent: water, 0.1-1.0; ammonium persulfate, 0.3-3.0; carbon tetrachloride, 5.0-15.0; glycerin, 55.0-70.0; dimethyl formamide, the rest.
EFFECT: enhanced reproducibility of electrophysical parameters at indium antimonide-anodic oxide interface.
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