FIELD: microelectronics.
SUBSTANCE: proposed electrolyte that may find wide application in MIS integrated circuit manufacture has organic solvent and oxygen-containing electricity conducting component. In addition it has carbon tetrachloride in the amount of 5 - 15 mass percent. Electrolyte may have organic solvent, pyrophosphoric acid, and carbon tetrachloride in following proportion, mass percent: pyrophosphoric acid, 0.3-3; carbon tetrachloride, 5-15, solvent, the rest.
EFFECT: improved parameters of semiconductor-anodic-oxide interface.
2 cl
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