FIELD: electricity.
SUBSTANCE: current is selected as a current-carrying copper foil with a rough surface that is placed in the thin-film deposition chamber by atomic-layer deposition and dried under vacuum for 1-3 hours, then at a temperature of 150-250°C by means of the atomic-layer deposition method, a single atomic layer of tin (IV) oxide is used, using tetraethyl tin. Next, a pulse heat treatment is carried out at a temperature of 300-325°C for 0.05-0.1 s, and the process is repeated until the thickness of the single-crystal thin-film anode is 100-200 nm. Such a short heat treatment time allows each bond layer of SnO2 to be structured with formation of a single-crystal structure.
EFFECT: increase in the cyclic stability of the anode while maintaining its high specific capacity and a single-crystal defect-free structure.
1 dwg, 1 tbl
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Authors
Dates
2017-06-21—Published
2016-07-07—Filed