METHOD FOR PRODUCING PHASE IMAGES Russian patent published in 2017 - IPC G02B21/00 G01B9/02 

FIELD: physics.

SUBSTANCE: coherent laser beam is divided into two beams according to the method of producing a phase image, the first of which is fed to the phase-contrast object, and the second one - to the reference mirror. The reflected first beam and the reflected second beam are combined and fed to the photodetector, and then the phase of each field of the phase-contrast object is determined. Herewith the phase shift of each field of the reference mirror is pre-determined, which is obtained based on the multiple phase measurements at each pixel of the photodetector with a random displacement of the test surface in each measurement with subsequent averaging the measurements. The previously measured phase of each field of the phase-contrast object is an intermediate phase, and the true phase of each field of the phase-contrast object is obtained by adjusting the intermediate phase to the phase shift corresponding to the given pixel of the reference mirror field.

EFFECT: achieving the recording of both systematic and random error component of the phase image, arising due to the inaccurate performance of the reference mirror.

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