PIEZO RESONANT-VISCOUS VACUUM GAUGE Russian patent published in 2017 - IPC G01L21/00 G01L9/00 G01L21/22 

FIELD: measuring equipment.

SUBSTANCE: measuring the gas pressure in the low and medium vacuum in the range of 0.001-1000 Torr for measuring adsorption and condensation of the gas components on the solid surface, regardless of changes in pressure and density of the gas. Essence: two heat-sensitive quartz resonators of the tuning-fork type and a semiconductor sensor are used in the proposed device. The resonator impedance is measured, depending on the gas pressure, the resonator frequency is measured, depending on temperature changes and the temperature measurement by the temperature sensor. The device contains electronic units for measuring impedance and frequency of the resonators, units for compensating the temperature and adsorption errors of the resonator impedance change signals and the adsorption errors of the resonator frequency change, a unit of transforming the resonator impedance change signals, depending on the gas pressure and the changes in the attached mass, the adsorption resonator mass. Displaying the gas pressure value and the relative change of the attached mass on the resonator is made using digital indicators.

EFFECT: expanding the gauge measurement range, decreasing the signal measurement errors of the resonator impedance changes depending on the gas pressure, expanding the functional capabilities.

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