METHOD OF MANUFACTURING COMPOSITE MEMBRANES BASED ON THIN FILM OF METALS Russian patent published in 2018 - IPC C23C26/00 B81B3/00 C23C14/18 

FIELD: technological processes.

SUBSTANCE: method of manufacturing composite hydrogen permeable membrane, containing thin selective film of Palladium-based alloy, includes drawing of thin selective film of Palladium-based alloy on porous substrate by magnetron sputtering. As a porous substrate a metal grid of broken twill is used with porous finely-dispersed ceramics layer applied on said grid providing protruding islets of metal threads of said grid over the porous finely-dispersed ceramics layer. In particular cases of invention embodiments, the islets of the metal threads of said grid are made spherical. The application of said thin selective film is carried out at a temperature providing a diffusion bond with the islets of metal threads of said grid. Between said metal grid with porous finely-dispersed ceramic layer and said thin selective film, an intermediate metallic layer is applied.

EFFECT: creation of membranes with high reliability and high selective gas permeability.

4 cl, 1 dwg