METHOD OF MANUFACTURING OPEN FRAME DIODE FOR SOLAR CELLS OF SPACE VEHICLES Russian patent published in 2018 - IPC H01L31/18 H01L21/18 H01L21/339 

FIELD: electrical engineering.

SUBSTANCE: invention relates to the field of discrete semiconductor devices technology and can be used in the manufacture of open-frame diodes for solar cells of space vehicles. Method of manufacturing a die-free diode for solar cells of space vehicles according to the invention includes forming a structure of a planar diode, performing thermal operations, metallization of the front and back sides of the silicon monocrystalline substrate, separation of the substrate onto the crystals, attachment of the electrically conductive tires, formation of a protective coating on the metallized surfaces of the die-free diode assembly and on the electrically conductive tires, while the protective coating on the metallized surfaces of the die-free diode assembly and on the electrically conductive tires is formed on the basis of nickel-gold sequentially in several stages: removal of organic contaminants by liquid methods, application of chemical nickel, flushing of the nickel-plated diode assembly, application of immersion gold, flushing of the gold-plated diode assembly, drying in vacuum.

EFFECT: invention will allow to improve the quality of open-die diodes and will provide the opportunity to manufacture open-frame diodes formed in a single technological cycle on a single substrate with identical characteristics.

1 cl, 2 dwg