FIELD: optics; electricity.
SUBSTANCE: invention relates to optoelectronics and can be used in the manufacture of displays, light-emitting diodes, gates of semiconductor structures such as metal-insulator-semiconductor, gas sensors and protective coatings. Process for preparation of thin films of tin-indium oxide, comprising applying a solution containing tetra(N,N-dialkylcarbamate) tin and tris(N,N-diethylcarbamate) indium to a substrate in a ratio of 1:99 to 99:1 in an alcohol or ether solvent with a concentration of 0.1–15 %, drying in air at room temperature and subsequent heat treatment at a temperature of 250–500 °C for 5–60 minutes.
EFFECT: invention provides improvement in the optical transparency and electrical conductivity of thin films of tin-indium oxide.
3 cl, 1 tbl, 10 ex
| Title | Year | Author | Number |
|---|---|---|---|
| INDIUM TRIS N, N-DIETHYLCARBAMATE, METHOD OF ITS PRODUCTION AND OBTAINING OF FILMS OF INDIUM OXIDE ON ITS BASIS | 2017 |
|
RU2649147C1 |
| BIS(N,N- DIETHYL CARBAMATE) OF TIN, METHOD FOR ITS PREPARATION AND MANUFACTURE OF ALLOYED TIN OXIDE FILMS BASED ON IT | 2020 |
|
RU2761322C1 |
| BIS(N,N-DIETHYL TIN CARBAMATE), METHOD FOR SYNTHESIS THEREOFAND PRODUCTION OF TIN OXIDE FILMS BASED THEREON | 2020 |
|
RU2762687C1 |
| METHOD OF PRODUCING THIN TIN DIOXIDE FILMS | 2010 |
|
RU2446233C1 |
| METHOD OF PRODUCING ORGANOTIN TRIS(N, N-DIALKYLCARBAMATES) AND USE THEREOF TO PRODUCE MODIFIED TIN (IV) OXIDE THIN FILMS | 2010 |
|
RU2447192C2 |
| METHOD FOR PRODUCING THIN-FILM COATING BASED ON INDIUM TIN OXIDE | 2023 |
|
RU2808498C1 |
| METHOD FOR PRODUCING THIN-FILM COATINGS BASED ON COBALT-NICKEL DOUBLE OXIDE | 2022 |
|
RU2792616C1 |
| METHOD FOR PRODUCTION OF THIN FILMS BASED ON INDIUM-TIN OXIDE BY MICRO-PLOTTER PRINTING | 2022 |
|
RU2785983C1 |
| FRONT CONTACT BASED ON INDIUM-ZINC OXIDE FOR PHOTOELECTRIC DEVICE AND METHOD OF MAKING SAID CONTACT | 2007 |
|
RU2413333C2 |
| METHOD OF APPLYING SnO COATING | 2019 |
|
RU2711386C1 |
