FIELD: optics; instrument engineering.
SUBSTANCE: invention relates to optical instrument-making, specifically to laser micro processing, and can be used to form micro channels on the surface of different substrates made from dielectric or metallic materials, for example from optical material and semiconductor materials, in making optical scales, reticles, grids. Invention is implemented due to supply of contactless measurement of local distance connected to controller by sensor, made with possibility of measuring distance to substrate, located in laser beam focusing system and performing sequential point-by-point determination of distances from the laser beam focusing system to the substrate surface inside the complete microprocessing field. Control unit is configured to generate three-dimensional topography.
EFFECT: technical result of claimed invention is high quality of upper edge of microchannel, fewer defects of substrate during production of microchannels, high quality of formed.
4 cl, 3 dwg
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