ELECTROMAGNETIC RADIATION DETECTOR WITH MICRO-ENCAPSULATION, AND DEVICE FOR DETECTING ELECTROMAGNETIC RADIATION USING SUCH DETECTORS Russian patent published in 2018 - IPC G01J5/20 

FIELD: measurement; testing.

SUBSTANCE: invention relates to the field of optical instrumentation and relates to an electromagnetic radiation detector. Detector comprises a plurality of micro-sites, each including a radiation sensitive membrane. Each micro-site is located in a microcavity formed by a substrate used as a transparent window by an upper wall and side walls attached to the substrate and the upper wall. Membrane is suspended above the substrate by means of support arms which include an electrically conductive layer. Ends of the support arms are fixed in the side walls. Substrate and side walls are made of successive layers which are directly formed one above the other by deposition.

EFFECT: technical result consists in increasing the spatial resolution and sensitivity of the device.

32 cl, 20 dwg