HIGH-INSULATION THERMAL DETECTOR Russian patent published in 2013 - IPC G01J5/20 H01L27/14 

Abstract RU 2489688 C2

FIELD: physics.

SUBSTANCE: detector for detecting electromagnetic radiation, especially infrared radiation, has a substrate and at least one microstructure having a membrane (2), which is sensitive to said radiation and is placed substantially opposite and at a distance from said substrate, wherein said membrane is directly or indirectly mechanically mounted to at least two longitudinal rectilinear collinear retaining members or support legs (3), at least one of which is mechanically connected to the substrate through an intermediate post (15), said membrane also being electrically connected to the substrate. At least collinear legs, called "first legs", are fastened to each other at the level of their ends, which are attached to the membrane (2) directly or indirectly through a mechanical connection which substantially lies in the same plane as the legs and the membrane, and the other end of at least said one legs is integrated into a single unit with a portal structure (4A), which lies substantially in the same plane as the legs and lies substantially at right angles to the main dimension of said legs, wherein said portal structure is integrated into a single unit with a post (15), which is integrated into a single unit with the substrate.

EFFECT: low cost of production and high efficiency, invention improves the current technological level for matrix detectors with very small matrix structure repetition step, method is very space-saving with respect to surface area.

13 cl, 10 dwg

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RU 2 489 688 C2

Authors

Vilen Mishel'

Dates

2013-08-10Published

2009-03-26Filed