FIELD: plasma machining of materials. SUBSTANCE: device is intended for deposition of protective coat. It includes vacuum vessel 1 for placement of material to be machined fitted with gas inlet and microwave energy generator located external to vacuum vessel. Vacuum vessel is provided with window 7 for transmission of microwave energy produced by generator. Vacuum vessel houses microwave antenna 12 bordering on window 7 and magnetic system 15 positioned close to microwave antenna for formation of local electron- cyclotron resonances. Magnetic system 15 incorporates holder in the form of rod of magnetically soft material having parallel flat surfaces on which separate magnets in the form of rows are placed equidistantly from each other. Pole ends of nearest magnets of adjacent rows have opposite polarity. EFFECT: enhanced functional efficiency and stability. 9 cl, 3 dwg
