METHOD TO PROCESS SURFACE OF AT LEAST ONE STRUCTURAL ELEMENT BY MEANS OF ELEMENTARY SOURCES OF PLASMA BY ELECTRONIC CYCLOTRON RESONANCE Russian patent published in 2014 - IPC H01J37/32 H05H1/46

Abstract RU 2504042 C2

FIELD: electricity.

SUBSTANCE: at least one rotary motion is given to a structural element or structural elements (1) relative to at least one row of fixed elementary sources (2) arranged as fixed into a line. The row or rows of elementary sources (2) arranged within a line are placed in parallel to the axis of the structural element or axes of rotation of structural elements.

EFFECT: higher homogeneity of treatment on multiple surfaces of structural elements.

11 cl, 7 dwg

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RU 2 504 042 C2

Authors

Shmidt Beat

O Kristof

Morehn-Perr'E Filipp

Dates

2014-01-10—Published

2008-10-09—Filed