DEVICE FOR MAKING ELECTRICALLY CONDUCTIVE COATING IN THE FORM OF METAL-CARBON OR METALLIC FILM BY MAGNETRON SPRAYING WITH MECHANICAL SUBSTRATE VIBRATION Russian patent published in 2023 - IPC C23C14/35 

FIELD: electrical engineering.

SUBSTANCE: invention relates to a device for producing an electrically conductive coating in the form of a metal-carbon or metal film by magnetron sputtering with mechanical vibration of the substrate. Said device comprises a magnetron chamber, in which a target and a magnetron emitter are placed, and a vibration generator, to which a rod is attached at one of its ends, oscillating under the action of an alternating voltage applied to it, configured for connection with the substrate. The vibration generator rod is U-shaped. On the end of the U-shaped rod that can be placed in the magnetron chamber, a T-shaped bracket is fixed, which is rigidly clamped between the shelves of the U-shaped rod of the vibration generator and is configured for fixing the substrate. The above-mentioned end of the U-shaped rod of the vibration generator is located in the T-shaped bracket. Said rod is configured for passing through the side wall of the magnetron chamber with sealing by sealing cuffs and for constant preloading of its end attached to the vibration generator by a spring. The vibration generator is configured for sliding with its base along the upper pair of rails in the form of a T-beam. An electromagnet is installed under the upper pair of rails, fixed on the lower pair of rails. Said upper and lower pairs of rails are connected by means of a rectangular plate, which reinforces the structural rigidity of the vibration generator mounting, and fixed in the holes of the bracket welded to the wall of the magnetron chamber, motionless relative to the magnetron chamber.

EFFECT: apparatus capable of producing a high quality electrically conductive coating is provided.

6 cl, 6 dwg