METHOD FOR OBTAINING HIGH-QUALITY FILMS BY MECHANICAL VIBRATION OF THE SUBSTRATE Russian patent published in 2021 - IPC C23C14/35 C23C14/16 C23C14/18 C23C14/20 

FIELD: film deposition.

SUBSTANCE: invention relates to a method for producing an electrically conductive coating on a metallic or non-metallic substrate using mechanical vibration. The working gas is supplied to the vacuum chamber with the substrate and ion-plasma spraying of the conductive coating on the substrate by magnetron sputtering. The said substrate is fixed on the rod of a vibration generator driven by a permanent magnet oscillating under the action of an alternating current passing through a coil to which membranes are attached to provide the substrate with vibrations in its plane with the formation of a film defect on the surface of the substrate in the form of a protrusion of atoms without providing the possibility of fixing subsequent ions of the sprayed coating on it. The mentioned ions are fixed in the resulting cavity to ensure homogeneity and uniformity of the coating. The vibration frequency of the substrate is the same as the frequency of the alternating current. To create an ordered flow of ions of the sprayed coating moving towards the vibrating substrate, a ring-coil of the asynchronous motor stator is installed between the target and the substrate, inside which the sprayed ions are deflected by a magnetic field and begin to move in a spiral or helical line.

EFFECT: invention ensures that a continuous homogeneous uniform conductive coating is obtained while minimizing the energy spent on the industrial implementation of the claimed method.

3 cl, 5 dwg