FIELD: optics.
SUBSTANCE: invention relates to scanning electron microscopes (SEM) and is intended for obtaining an electron microscope image and local elemental analysis of a radioactive sample in a radiation protection chamber with data visualization on a computer screen. Essence of the invention lies in the fact that the device for obtaining an electron microscopic image and a local elemental analysis of a radioactive sample by electron microscopy in a radiation protection chamber contains an electronic unit, vacuum sensor, a wave dispersion spectrometer, a control unit and a turbomolecular pump equipped with lead radiation shielding screens against a radioactive sample under investigation placed on the working table of a microscope, in addition, the pen drive of the aperture unit is equipped with two electric drives for moving the apertures in two mutually perpendicular directions in the same plane, and the reverse-reflected-electron detector drive handle is electrically operated and with a toothed belt drive.
EFFECT: enhanced functionality through the use of an EMS in a radiation protection chamber.
1 cl, 5 dwg
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Authors
Dates
2019-01-29—Published
2018-01-09—Filed