COPLANAR WAVEGUIDE OF ELECTROOPTIC MODULATOR OF TRAVELING OF WAVE ON BASIS OF MACH-ZEHNDER INTERFEROMETER Russian patent published in 2019 - IPC G02F1/35 

FIELD: optics; electrical equipment.

SUBSTANCE: invention relates to the field of integrated optoelectronic components used in the field of optical communication, in particular to coplanar waveguides of electro-optical traveling-wave modulators based on a Mach-Zehnder interferometer, and can be used for amplitude modulation of laser radiation, processing and transmission of optical information. Coplanar waveguide of an electro-optic traveling-wave modulator based on a Mach-Zehnder interferometer designed for operation in the frequency range from f_min to f_max with an acceptable SIR level, made in the form of central and grounding electrodes of various sections placed on the substrate, forming successively the zone of input of the electrical signal into the coplanar waveguide, active modulation zone formed by parallel sections of central and grounding electrodes of equal length, and the electromagnetic wave absorption zone, which includes the grounding resistor, whose resistance R in the working frequency range is equal to the wave resistance Z of the waveguide, is provided with an additional absorption zone of length L'', in which the electrodes are made of the same cross section and orientation as in the core of a material with resistivity ρ subject to the condition in the entire frequency range from f_min to f_max.

EFFECT: modulation quality improvement.

1 cl, 6 dwg