DEVICE FOR MEASURING THE LENGTH OF INFRARED SURFACE OF THE ELECTROMAGNETIC WAVE Russian patent published in 2019 - IPC G01N21/17 G01J3/42 

FIELD: measurement technology.

SUBSTANCE: invention relates to the field of contactless investigation of the surface of metals and semiconductors and relates to a device for measuring the propagation length of an infrared surface electromagnetic wave (SEW). Device contains a source of p-polarized monochromatic radiation, a cylindrical focusing lens, a solid-state flat-faceted specimen with a wave-guiding face, a radiation to SEW conversion element, made in the form of a cylindrical segment, an element that converts SEW into a volume wave, which is identical to the element that converts radiation to SEW, a movable platform, an angle mirror placed on the platform, the plane of symmetry of which is parallel to the plane of incidence of radiation, a photodetector and a measuring device connected to it. Device additionally contains an opaque screen separating the transformation elements, which, in turn, are adjacent to one edge of the waveguide face opposite to the reflecting surfaces of the mirror and perpendicular to its plane of symmetry. Transformation elements are equidistant from the plane of symmetry of the mirror, and the platform can move along the plane of radiation incidence.

EFFECT: technical result consists in reducing the number of mirrors included in the device and the number of reflections of the SEW mirrors in the measurement process.

1 cl, 1 dwg