APPARATUS FOR MEASURING THE PROPAGATION LENGTH OF AN INFRARED SURFACE ELECTROMAGNETIC WAVE Russian patent published in 2019 - IPC G01N21/17 

FIELD: measurement technology.

SUBSTANCE: invention relates to investigation of metal surfaces and semiconductors by optical methods and to device for measuring propagation length of infrared surface electromagnetic wave (SEW). Device comprises a source of p-polarized monochromatic radiation, a solid-state plane-faced pattern with a wave guiding wave, a radiation conversion element in SEW, conversion element SEW into body wave, movable platform capable of moving parallel to said face along track SEW, a mirror arranged on the platform and oriented perpendicular to the waveguide face and abutting thereon by its reflecting surface, a photodetector, a measuring instrument and a beam divider SEW. Beam splitter is made in the form of a partially transparent plane-parallel plate oriented perpendicular to the sample face and at angle of 45° to radiation incidence plane. Mirror is selected as flat and oriented perpendicular to plane of incidence. Photoreceiver is placed at the edge of the face in a plane perpendicular to the plane of incidence.

EFFECT: technical result consists in reducing the number of elements included in the device, simplifying the measurement procedure and increasing the signal-to-noise ratio.

1 cl, 1 dwg