METHOD FOR DETECTING NEAR-FIELD OPTICAL RESPONSE FOR SCANNING PROBE MICROSCOPE Russian patent published in 2019 - IPC G01Q60/18 G01Q30/06 

FIELD: optics.

SUBSTANCE: invention relates to high spatial resolution optical methods based on probe microscopy methods. Summary of the invention is that in the method for detecting near-field optical response for a scanning probe microscope, involving approaching the probe transducer oscillating at frequency Ω with the sample, focusing on a tip of a probe optical radiation sensor with a wavelength λ in range of 0.4 to 500 mcm of the radiation source by means of the focusing element, measuring near-field optical response by a first synchronous detector by detecting an optical detector signal at a higher harmonic of oscillations of the probe sensor nΩ, where n is the order of the higher harmonics, using the Michelson interferometer scheme, in which the displacement unit places the reference arm mirror into the predetermined positions using the feedback system, position of mirror of support arm is changed by means of displacement module so that difference of phases of near-field optical response and radiation reflected from mirror of support arm is kept constant.

EFFECT: reduced measurement time, faster operation, reduced noise during measurement and reduced measurement error of near-field response of the sample, as well as broader functional capabilities of the device.

8 cl, 4 dwg