SCANNING PROBE MICROSCOPE AND CONTROLLER OF THE SCANNING PROBE MICROSCOPE Russian patent published in 2022 - IPC G01Q10/00 

FIELD: electrical engineering.

SUBSTANCE: group of inventions relates to scanning probe microscopy. The scanning probe microscope includes a vibrating probe sensor, a vertical drive for reciprocal movement of the sensor and the sample perpendicular to the scanning plane, a measuring transmitter of signals from the vibrating probe sensor, containing a controller including at least one feedback circuit including a digital signal processor connecting the output of the measuring transmitter of signals from the vibrating probe with the vertical drive, a programmable gate array programmed to execute direct digital synthesis of a variable signal, a USB unit for communication with a computer, means for processing the signal from the measuring transmitter of signals from the vibrating probe sensor using at least one dual phase synchronous mixer and low-pass filters. A galvanic separation unit is introduced before the USB unit. At least one dual analogue phase synchronous mixer is installed on the board of the digital signal processor and is configured to supply an output signal first to a third-order analogue filter, then to a multiplexer, then to a digital signal processor for digital filtering.

EFFECT: creation of a functional scanning probe microscope.

8 cl, 1 dwg