IMAGE FORMING METHOD IN SCANNING PROBE MICROSCOPY Russian patent published in 2019 - IPC G01Q30/06 B82Y35/00 G01Q60/24 

FIELD: physics.

SUBSTANCE: invention relates to the field of scanning probe microscopy, mainly to atomic force microscopy. Essence of invention consists in the fact that in method of image formation in scanning probe microscopy, which includes line scanning of sample surface in forward and reverse directions and recording signals S_ƒ and S_b, corresponding to signal S when scanning each line in forward and backward directions, values of which correspond to two matrix of numbers Sƒ_{i, j} and Sb_{i, j}, which are image matrices and pixelated image, at least one row of image matrix S_{i, j} of signal S is formed by a sequence of procedures, including shift of elements of at least one of matrixes of signal S along direction of scanning, relative to elements of other matrix by value ΔX, wherein at least on one part of at least one line signals S_ƒ and S_b, measured during movement in forward and reverse directions, and calculation of at least one row of image matrix S_{i, j} by formula: S_{i, j} = 0.5 * (Sƒ_{i, j} + Sb_{i, j}) - F (Sƒ_{i, j},Sb_{i, j}) where Sƒ_{i, j}, Sb_{i, j} - matrix of images of signal S, measured respectively in forward and reverse scanning directions, F(Sƒ_{i, j}, Sb_{i, j}) is a function of signals S_ƒ, S_b, type of which is determined by signal type S.

EFFECT: technical result consists in improvement of speed of scanning and reliability of obtained data.

15 cl, 11 dwg