FIELD: physics.
SUBSTANCE: in the method of measuring surface topography and properties for a scanning probe microscope, scanning is carried out in a direction parallel the surface of the sample on a given path. Data are recorded during forward and backward pass and in order to generate a signal which controls displacements perpendicular to the surface of the sample, an array of values of the control signal recorded on the previous scanning line is used together with an array of values of the mismatch error signal, multiplied by the calibration coefficient.
EFFECT: high speed of scanning and reduced measurement errors.
12 cl, 8 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD OF OBJECT SURFACE RELIEF MEASUREMENT USING SCANNING PROBE MICROSCOPES | 2006 |
|
RU2329465C1 |
| IMAGE FORMING METHOD IN SCANNING PROBE MICROSCOPY | 2017 |
|
RU2698953C2 |
| SCANNING PROBE MICROSCOPE AND CONTROLLER OF THE SCANNING PROBE MICROSCOPE | 2021 |
|
RU2764379C1 |
| CONTROL UNIT FOR SCANNING PROBE MICROSCOPES | 2007 |
|
RU2428700C2 |
| METHOD OF AUTOMATIC DISTRIBUTED CALIBRATION OF PROBE MICROSCOPE'S SCANNER | 2005 |
|
RU2295783C2 |
| SCANNING PROBE MICROSCOPE | 2011 |
|
RU2461839C1 |
| METHOD OF FORMING OBJECT SURFACE TOPOGRAPHY IMAGE | 2009 |
|
RU2419089C1 |
| SCANNING PROBE MICROSCOPE FOR BIOLOGICAL APPLICATIONS | 2008 |
|
RU2472165C2 |
| METHOD FOR MEASURING SURFACE RELIEF BY MEANS OF SCANNING PROBE TYPE MICROSCOPE | 1999 |
|
RU2175761C2 |
| METHOD MEASURING CHARACTERISTICS OF SURFACE MAGNETIC FIELD WITH USE OF SCANNING SOUNDING MICROSCOPE | 2000 |
|
RU2193769C2 |
