FIELD: physics.
SUBSTANCE: invention relates to methods of investigating devices for tightness. Summary: test object (16) is placed in film chamber (10) having at least one flexible wall area (12, 14). Film chamber (10) is vacuumed to a pressure which is less than the pressure of the test gas inside test object (16) and than the atmospheric pressure. Carrier gas is introduced into film chamber (10) into region (18) outside test object (16). Concentration of test gas of the gas mixture is measured in the film chamber in region (18) outside the test object. Test gas used is gas or a gas component contained in test object (16) already when it is introduced into film chamber (10).
EFFECT: technical result is higher sensitivity of inspection.
11 cl, 3 dwg
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