HIGH-SPEED BROADBAND INFRARED MICROBOLOMETRIC DETECTOR Russian patent published in 2016 - IPC H01L31/09 G01J5/20 B82B1/00 

FIELD: physics.

SUBSTANCE: invention can be used in making microbolometric arrays which detect radiation in two infrared ranges with wavelengths of 3-5 mcm and 8-14 mcm, which correspond to atmospheric transparency windows. An infrared microbolometric detector includes a single microbridge layer with multiple pixels, each comprising a structured layer of silicon nitride, a radiation detecting layer of vanadium oxide and an absorbent material-containing layer. The absorbent material is a tantalum film with the thickness of 3-20 nm, wherein the thickness of the silicon nitride layer is not greater than 210 nm and the thickness of the vanadium oxide layer is 170 nm.

EFFECT: designing a microbolometric detector, having equal absorption coefficients in two spectral ranges, and faster operation of the said detector without reduction in resolution.

1 tbl, 8 dwg