X-RAY MASK Russian patent published in 2022 - IPC G03F1/22 

FIELD: medical equipment.

SUBSTANCE: area of application: for creating microstructures. Substance of the invention consists in the X-ray mask consisting of a substrate, a thinned membrane, a topological pattern applied to the thinned membrane, and alignment marks, wherein the substrate, the thinned membrane, and the alignment marks are made of the same material - leucosapphire and constitute a monolithic structure, a thin metal conductive layer is applied to the membrane, and a layer capable of converting the absorbed heat of X-ray radiation into infrared radiation is applied to the back surface of the membrane.

EFFECT: possibility of aligning layers in the optical and infrared spectral bands using alignment marks and possibility of hybrid lithography, as well as expanded possibility of using the claimed X-ray mask in the hard and soft X-ray radiation bands, minimised topology distortion, and reduced mechanical distortion of the membrane.

9 cl, 2 dwg