FIELD: physics.
SUBSTANCE: invention relates to the computer equipment. Image processing system (IPS) includes: an input port (IN) for obtaining projection images (F): image of mask (MI) and contrast image (AG) from sample (SP) with object (OB), wherein MI and AG are obtained at different times and each represents analysed section of ROI with different contrasts; Recognition point identifier (LID); motion estimation unit (ME); motion compensation unit (MC); a subtraction unit (DIFF) for subtracting the registered M1 from the AG to obtain a differential image (DF1) of the ROI and an output port (OUT) configured to output the differential image (DF1).
EFFECT: technical result is the improvement of image quality.
15 cl, 5 dwg
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