METHODS FOR PRODUCING ARRAYS OF NANO- AND MICROPARTICLES OF METALS Russian patent published in 2020 - IPC C23C14/20 C23C14/34 B82B3/00 B82Y40/00 

FIELD: physics.

SUBSTANCE: invention relates to the field of ultrafine media and nanotechnology and can be used in development of indicator matrices in different plasmon resonance sensors and sensors, emitters, nano- and microelectronic devices, and measurement equipment. Method of producing massifs of nano- and microparticles of metals includes steps of placing a substrate in a working chamber, generating an aerosol of metal particles by an electric-discharge method, transporting a stream of metal particles to the surface of the substrate, wherein the substrate material used is polymer filters based on radiation-modified powdered polyethylene, made by sintering, which have the following characteristics: average pore size - from 1 to 10 mcm; total porosity - from 40 to 55 %; air capacity at a pressure drop of 0.022 MPa - 66 m³/h; wherein samples are used in the form of disks with diameter from 25 to 60 mm, with thickness from 5 to 10 mm, and aerosol generation of metal particles is carried out in air medium.

EFFECT: technical result is the simplification and improvement of the quality of the technology of obtaining massifs of nano- and microparticles of metals, eliminating the need to carry out the process in high vacuum conditions, providing controlled deposition and spatial distribution of nano-/microparticles of metals.

3 cl, 6 dwg, 2 tbl, 2 ex