3D MICROSTRUCTURES FORMATION METHOD IN OPTICAL MATERIALS Russian patent published in 2020 - IPC B23K26/122 B23K26/146 B23K26/352 

FIELD: optics.

SUBSTANCE: invention relates to a method of forming 3D microstructures in optically transparent material and can be used, for example, for making microoptical elements, fibre and integrated optics, photonics, plasmonics, sensorics and microfluidics. Pulsed laser radiation is exposed to the surface of optically transparent material which is in contact with working fluid absorbing laser radiation. Method includes layer-by-layer removal of optically transparent material, which is placed in wall of chamber filled with working fluid, pressure of which is varied in range from 1 to 30 MPa. Laser radiation beam is focused on the reverse surface of the optically transparent material. Exposure of laser radiation is carried out with formation of a region of high absorption of laser radiation in the working fluid on the boundary with the processed material and formation of 3D microstructures. Energy density of a laser pulse is 5–500 J/cm² and a pulse duration of 4–50 ns. As liquid laser absorbing liquid, salts of noble metals, for example, gold or silver, in particular silver nitrate are used.

EFFECT: disclosed is 3D microstructures formation method in optical materials.

3 cl, 4 dwg