METHOD FOR MICROPATTERNING SURFACE OF TRANSPARENT MATERIALS Russian patent published in 2017 - IPC B23K26/38 B82B3/00 C03B33/08 

FIELD: physics.

SUBSTANCE: invention relates to a method for micropatterning a surface of transparent materials by forming holes, channels and other structures by the action of a focused laser beam on the boundary of a transparent material and an absorbing liquid and can be used, for example, for manufacturing elements of micro-optics, fibre and integrated optics, plasmonics, microfluidics. The method includes the action of the focused pulsed laser radiation on the back surface of a sample of a transparent material in contact with a laser radiation absorbing liquid represented by precursors of noble metals. Under the influence of laser radiation, the precursors are reduced to atoms of the corresponding metal, which collect into nanoparticles and aggregates, forming an area of increased absorption at the boundary with the processed material.

EFFECT: when overlapping the wavelength of the laser radiation with the band of plasmon absorption of nanoparticles and aggregates, the mentioned processes are resonantly enhanced, which ensures effective etching of the surface of the processed material, in particular, a significant increase in the etching depth.

3 cl, 1 dwg