METHOD FOR MEASURING THE SPEED OF SURFACE ACOUSTIC WAVES IN A PIEZO-SUBSTRATE Russian patent published in 2020 - IPC G01H5/00 

FIELD: measuring equipment.

SUBSTANCE: invention relates to the field of measurement equipment and can be used for measurement of speed of propagation of surface acoustic waves (SAW) in the piezo-substrate. SAW speed measurement method consists in the fact that SAW is excited in controlled piezo-substrate and reflected signal is received. At that, on the piezo substrate there is formed a topology corresponding to its specified operating frequency, in which excitation of SAW and reception of the reflected signal is carried out by one interdigital transducer (IDT) located between groups of reflecting structures, where reflecting structures on one side of IDT are offset relative to it by a certain value. Parameters of IDT and reflecting structures are selected by providing condition of acoustic synchronism. Then, the received reflected signal is supplied to the vector analyzer, which provides its representation in the form of resistance to frequency dependence, the region with the largest number of amplitude bursts is determined, section of the curve having maximum sweep is identified, the minimum value of this section is used to determine the value of the actual operating frequency of the piezo substrate by projection and to calculate the actual propagation speed SAW in the piezo-substrate in accordance with a given ratio.

EFFECT: high accuracy of measuring propagation speed of SAW in a piezo-substrate.

1 cl, 4 dwg