METHOD OF PRODUCING FERROMAGNETIC NANOPARTICLES-DISCS USING PROBE LITHOGRAPHY AND LIQUID CHEMICAL ETCHING Russian patent published in 2021 - IPC B82B3/00 

FIELD: technological processes.

SUBSTANCE: invention can be used to produce ferromagnetic nanoparticles-disks. Substance of invention consists in the fact that metal films are alternately deposited on a substrate using vacuum sputtering methods, wherein the particles are obtained according to the descending process, forming the mask to obtain the required topology is carried out using the probe microscope needle by directly depositing a layer of molecules containing a thiol group, at temperature of 22-25°C and relative humidity of 33-36%, removal of uncoated layers of gold is carried out in a solution of aqueous mixture 0.1 M Na₂S₂O₃, 1.0 M KOH, 0.01 M K₃Fe(CN)₆ and 0.001 M K₄Fe(CN)₆ in ratio of 1:1:1:1 (V/V/V/V) with constant stirring and temperature of solution 22°C, separation of nanoparticles from substrate by removing soluble ZnO sublayer in 10% aqueous solution of citric acid with constant stirring and temperature of solution 22°C.

EFFECT: obtaining ferromagnetic particles in form of a multilayer disc with a ferromagnetic metal core and a protective biocompatible gold coating using low-toxic reactants and starting materials, which enable to obtain particles with given parameters (size, shape) and high degree of homogeneity without restrictions on maximum dimensions and geometry of obtained particles.

1 cl, 2 dwg