FIELD: microelectronics.
SUBSTANCE: invention relates to the field of microelectronics and can be used in systems generating or storing electrical power (capacitors, supercapacitors, current sources). The multichannel electrode includes a substrate of an inert dielectric material, with a honeycomb structure formed by tubular microchannels, a submicron current-conducting coating of an inert metal, e.g., silver, applied to the surface of the substrate and the surface of the microchannel walls, an active layer of a superionic conductor in form of nano- and submicro-sized particles, and a current collector applied to the substrate. The technical result is achieved due to the fact that the active layer of the superionic conductor is applied directly to the current-conducting coating of the microchannel walls and comprises particles of a solid solution of a composition KxMyTi(8-y)O16 with a hollandite structure, wherein M is at least one transition metal.
EFFECT: increased specific electrical capacity of the electrode, retained after repeated charge-discharge cycling, and thus, increased specific power stored by the electrode while being connected to an electrical circuit comprised in an electrical power accumulator.
1 cl, 5 dwg, 1 tbl
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Authors
Dates
2021-07-14—Published
2020-12-22—Filed