METHOD FOR APPLYING A THIN-FILM POLYACRYLONITRILE-BASED COATING Russian patent published in 2021 - IPC C23C14/12 C23C14/32 

FIELD: coatings.

SUBSTANCE: invention relates to a method for applying a thin-film polyacrylonitrile-based coating onto a substrate made of silicon, ceramics or quartz, and can be used for manufacturing modified polymers, metal-carbon nanocomposites, electrically conductive heat-resistant radio-absorbing coatings, gas sensors. Polyacrylonitrile in the form of a microdispersed powder, pressed granules or tablets is placed in a crucible made of a high-melting material, located in a vacuum chamber. A pre-cleaned substrate is fixed on a rotating substrate holder located in the vacuum chamber, and heated to a temperature of 40 to 120°C. The volume of the chamber is then pumped out by a vacuum system to a pressure of 2.0×10^-4-2.5×10^-3 Pa, and the crucible with polyacrylonitrile, closed with a flap, is heated at a rate of 15 to 20°C/min to a temperature of 130 to 270°C at a residual pressure of 1×10^-3-1×10^-2 Pa. After the pressure is restored to a value of no greater than 4∙10^-3 Pa, said flap is opened and the crucible with polyacrylonitrile is heated at a rate of 15 to 20°C/min to a temperature of 300 to 450°C to evaporate polyacrylonitrile and uniformly move vapours thereof from the crucible to the substrate.

EFFECT: increase in adhesion and, as a result, an increase in the uniformity of application of the produced thin-film polyacrylonitrile-based coating.

1 cl, 4 dwg, 1 tbl