FIELD: physics.
SUBSTANCE: method of making SPM nanosensors is based on a growth electronic stimulation technique and is realised in three steps. A V-shaped silicon cantilever is made on a silicon or metallic holder-base from a silicon-containing precursor gas using an electron beam. Similarly, a detecting element is grown from the bottom at the sharp end of the said cantilever from a carbon-containing precursor gas. A carboxylic plateau is formed on top, on which a light-reflecting coating is grown from a gold-containing precursor gas using an electron beam.
EFFECT: increased flexibility of the cantilever, simple technology of the manufacturing process.
| Title | Year | Author | Number |
|---|---|---|---|
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|
RU2660418C1 |
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|
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| MULTI-PROBE CONSOLE TYPE SENSOR FOR SCANNING PROBE MICROSCOPE | 2003 |
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| CANTILEVER WITH SILICON NEEDLE OF COMPLEX SHAPE | 2020 |
|
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| METHOD FOR MEASURING SURFACE TEXTURE PROPERTIES AND MECHANICAL PROPERTIES OF THE MATERIALS | 2010 |
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| MULTIPLE-PROBE SENSOR OF CONTOUR TYPE FOR SCANNING PROBE MICROSCOPE | 2013 |
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RU2592048C2 |
