FIELD: vacuum measuring equipment.
SUBSTANCE: invention relates to vacuum measuring equipment for measuring the vacuum level in microcavities, microvolumes and sensor housings of microsystem equipment, in particular to microelectromechanical vacuum gauges using the principle of resonance as the main mechanism of operation. The device is made on the base and consists of a resonator that oscillates along the plane of the base, comb control electrodes forming an interdigital structure with the comb electrodes of the resonator, and signal electrodes for reading the signal. The base and the resonator are made of monocrystalline silicon and are connected by means of a single suspension with varying rigidity, in addition, the resonator additionally contains a system of dampers located along its axis of symmetry.
EFFECT: increasing the pressure measurement range towards high vacuum and the stability of the microelectromechanical vacuum gauge.
1 cl, 3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| MICROVACUUMMETER | 2021 |
|
RU2774181C1 |
| METHOD OF THE KELVIN-VOIGT MODEL COEFFICIENTS DETERMINING FOR THE MICRO-MECHANICAL RESONATOR ADHESIVE CONNECTION WITH THE BASE | 2017 |
|
RU2652639C1 |
| METHOD OF SPECIFYNG COEFFICIENTS OF MICROMECHANICAL GYROSCOPE GIMBAL RIGIDITY AND DAMPING CROSSES AND MICROMECHANICAL GYROSCOPE WITH METHOD IMPLEMENTED | 2007 |
|
RU2346239C1 |
| METHOD OF ELECTRICALLY INSULATED SILICON REGIONS FORMATION IN BULK OF SILICON WAFER | 2009 |
|
RU2403647C1 |
| ANGULAR SPEED METER | 2012 |
|
RU2486468C1 |
| METHOD AND DEVICE TO MEASURE ANGULAR SPEED | 2010 |
|
RU2426132C1 |
| METHOD TO SUPPRESS FALSE SIGNAL IN ANGULAR SPEED METRE WITH MICROMECHANICAL GYROSCOPES | 2012 |
|
RU2486469C1 |
| METHOD AND DEVICE TO MEASURE ANGULAR SPEED | 2010 |
|
RU2426131C1 |
| INTEGRATED MICROELECTROMECHANICAL SWITCH | 2018 |
|
RU2705792C1 |
| METHOD TO MEASURE GOOD QUALITY OF RESONANT CIRCUIT AND DEVICE FOR ITS REALISATION | 2013 |
|
RU2564699C2 |
