MICROVACUUMMETER Russian patent published in 2022 - IPC G01L21/22 

FIELD: vacuum measuring equipment.

SUBSTANCE: invention relates to vacuum measuring equipment for measuring the vacuum level in microcavities, microvolumes and housings of sensors of microsystem technology, in particular to microvacuum meters using the principle of resonance as the main mechanism of operation. In a microvacuum gauge with a sensitive element made on the base and consisting of a resonator oscillating along the plane of the base and connected to it by means of four suspensions; a comb control electrode forming an interdigital structure with the comb electrode of the resonator, and signal electrodes for signal reading. The base and the resonator are made of single-crystal silicon, the suspensions are movable along the base plane and contain two combined mutually perpendicular spring elements, the resonator contains a system of additional dampers.

EFFECT: increasing the range of pressure measurement towards high vacuum and the stability of the microelectromechanical vacuum gauge.

1 cl, 3 dwg