FIELD: metallurgy.
SUBSTANCE: invention relates to metallurgy, particularly, to chemical-thermal treatment of parts surface. Method of vacuum ion-plasma cleaning of parts includes loading into chamber of parts cleaned from impurities, obtaining vacuum in it and ion cleaning. Prior to ion cleaning, chamber is blown with argon for 2–5 minutes at pressure of 1,330 Pa, then pumped to pressure of 5–15 Pa, and ion cleaning is carried out at voltage 800–900 V in gas plasma of high-density inert gas, which is obtained in glow discharge with application of crossed electric and magnetic fields.
EFFECT: higher efficiency of vacuum ion-plasma treatment.
1 cl, 1 dwg, 1 ex
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