LASER ACCELERATOR OF CHARGED PARTICLES FOR TESTING ELECTRONIC COMPONENT BASE Russian patent published in 2022 - IPC G01R31/302 

FIELD: electronic component base testing.

SUBSTANCE: invention relates to tests of electronic component base for resistance to charged particles. The laser particle accelerator consists of a femtosecond high-contrast frequency laser; laser radiation contrasting systems; at least two vacuum target chambers, each of which implements its own scheme of laser target irradiation; deflecting mirror; target assembly, in each of the vacuum target chambers; an optical focusing system consisting of a rotating mirror and a parabolic focusing lens; cleaning systems for solid-state laser targets from contamination; at least two irradiation chambers, where the tested devices are aligned with respect to the beam of charged particles by means of the positioning system of the device under test; power supply and control systems for tested devices; a magnetic system for deflecting charged particles and a system for transporting charged particles, with the help of which narrow bands are selected from the spectrum of charged particles, transported to the irradiation chamber and focused on the device under test.

EFFECT: improving performance, improving the quality of testing, improving the efficiency of particle acceleration.

2 cl, 1 dwg