METHOD FOR MANUFACTURING CATHODE-GRID UNIT WITH FIELD-EMISSION CATHODES Russian patent published in 2023 - IPC H01J9/02 

FIELD: electronic engineering.

SUBSTANCE: creation of cathode-grid units with field emission cathodes for vacuum devices. A method for manufacturing a cathode-grid unit of an electrovacuum device includes manufacturing a multipoint field emission cathode in the form of a cone, pyramid, blade or any other shapes with pointed tops and a grid electrode with holes for each single field emission cathode and matching grid electrode holes with the centres of single field emission cathodes. Field emission cathodes are formed on a single dielectric substrate by etching or laser milling so that each single field emission cathode is electrically isolated from all the others and has an electrical output independent of the others for supplying voltages of various magnitudes. This method allows to control the currents of each single field emission cathode and, by applying voltages of different magnitudes between single cathodes and the grid electrode, select currents of the same magnitude in each field emission cell that do not result in excessive thermal heating and melting of the tops of single field emission cathodes.

EFFECT: providing the possibility of controlling the absolute values of currents from each single field emission cathode and adjusting them, that is, increasing or decreasing by supplying the corresponding values of the potential difference between the cathode and the grid in each cell within safe values that do not result in melting of the tops of the field emitters with Joule heat, thereby ensuring the reliability and durability of the CGU.

4 cl, 1 dwg