METHOD FOR MANUFACTURING A FIELD-EMISSION CATHODE Russian patent published in 2023 - IPC H01J9/02 H01J1/308 

FIELD: electronic engineering.

SUBSTANCE: invention relates to the field of electronic engineering and can be used in the manufacture of products of emission electronics based on field emission of multipoint structures, as well as in the manufacture of electrode assemblies for laser and plasma systems. A method for manufacturing field-emission cathodes in the form of a periodic multi-tip structure includes the formation of tip field-emitters on the cathode substrate, which are a continuation of the cathode substrate, and fixing the multi-tip structure. In this case, the formation of the cathode structure occurs from the powder material on the cathode conductive substrate, and the formation of emitters and the emitting structure occurs due to the action of an external magnetic field of a permanent magnet with a magnetic induction of 0.5-1.5 T, which is in axial rotation at a frequency of 1-5 rpm and located so that the magnetic field lines are perpendicular to the cathode substrate, while metal particles with a size of 10-100 microns are used as a powder material.

EFFECT: invention provides the ability to ensure high reproducibility of the geometric parameters of the multipoint structure due to the use of an external magnetic field, which makes it possible to simplify the manufacturing technology.

2 cl, 3 dwg