FIELD: electromagnetic radiation.
SUBSTANCE: methods for manufacturing devices for detecting electromagnetic radiation, in particular infrared or terahertz radiation. Method for manufacturing a device for detecting electromagnetic radiation comprises at least one thermal detector on a substrate and one sealing structure, which together with the substrate defines a cavity in which the thermal detector is located, the method includes manufacturing a thermal detector; providing a thin sealing layer of the sealing structure extending over the thermal detector, the thin sealing layer being made of a sealing material; creating, by physical vapor deposition (PVD), a second thin seal layer overlying the first thin seal layer, wherein the second thin seal layer is made of a seal material with a coefficient of thermal expansion different from that of the material of the first seal layer of the material. The method according to the invention includes, creation on the first thin encapsulating layer, before the step of creating the second thin sealing layer, at least one pattern with a suitable average thickness, so that during the deposition of the second thin sealing layer, the latter is formed from at least one segment located on the first thin sealing layer, and from at least one area separated from the specified segment of the second layer and lying on the pattern, thereby forming a local discontinuity of the second thin sealing layer at the pattern.
EFFECT: method proposed according to the invention makes it possible to manufacture such detecting devices that provide an increase in the mechanical strength of the sealing structure.
11 cl, 11 dwg
