FOCAL MATRIX RECEIVER AND ITS FABRICATION Russian patent published in 2015 - IPC H01L27/146 

FIELD: process engineering.

SUBSTANCE: invention relates to fabrication of focal matrix receivers. Production of this receiver including at least one pixel comprises the steps that follow. Making of the first plate with sensitive material on its surface coated by first sacrificial ply. Note here that said sensitive material forms one or more pixels on said first plate. Making of support stems for at least one pixel inside first sacrificial ply and first conducting sections in the surface of the latter to contact with said stems. Making of second plate provided with read-off IC (ROIC). Note here that said second plate is coated with second sacrificial ply with second conducting sections made therein to contact with read-off IC. Sacrificial oxide plies of said first and second plates are brought in contact with each other to align said first and second contact sections to make a conducting jumper. First and second plates are spliced to make sensitive material transferred from first plate to second plate after removal of bulky sacrificial ply. Sacrificial oxide plies are removed to expose at least one pixel. Note here that said support stems are located completely between sensitive material of their pixel and second plate.

EFFECT: maximized active sensitive surface.

12 cl, 11 dwg