FOCAL MATRIX RECEIVER AND ITS FABRICATION Russian patent published in 2015 - IPC H01L27/146 

FIELD: process engineering.

SUBSTANCE: invention relates to fabrication of focal matrix receivers. Production of this receiver including at least one pixel or more pixels comprises the steps that follow. Making of the first plate with sensitive material on its surface coated by first sacrificial ply. Making is second plate provided with read-off IC (ROIC) and contact site coated with second sacrificial ply. Support stems are made in the latter to contact with contact sites and coated wit extra sacrificial ply. First and second plates are spliced to make sensitive material transferred from first plate to second plate after removal of bulky sacrificial ply. Pixel is formed in sensitive material above every support stem or every set of support stems. Through jumper is made in every pixel to allow electric connection between pixel top surface and its support stem or support stems. Sacrificial plies are removed to expose one or more pixels. Note here that sole or every pixel I configured so that its stems are located completely under sensitive material of the pixel.

EFFECT: maximized active sensitive surface.

9 cl, 11 dwg