METHOD FOR MANUFACTURING MEMBRANE-LEVER POWER SENSOR Russian patent published in 2023 - IPC G01L9/04 G01L1/22 

FIELD: instrumentation.

SUBSTANCE: invention can be used in the manufacture of membrane-lever force sensors. The method consists in the following: before fixing the SOS-structure with a bridge of strain gauges on an elastic element made of titanium in the form of a glass with a power-transmitting lever and a membrane, a stiffening rib 3-5 mm high and 1-2 mm thick is formed on its membrane, monolithically connected with it and the lever. Two notches 0.2 mm deep are applied to the open end of the glass and positioned perpendicular to the stiffening rib, then a layer of polycrystalline aluminium oxide 20-50 μm thick is applied to the flat surface of the membrane. Then, a SOS structure is installed on the membrane through the solder layer, orienting it so that the longitudinal axes of the strain gauges are perpendicular to the stiffening rib and soldering it to the membrane. The introduction of a stiffening rib into the design of the elastic element and two notches perpendicular to it makes it possible to unambiguously apply a measured force to the membrane, which makes it possible to increase the accuracy of its measurement. The application of aluminium oxide to the membrane makes it possible to reduce the level of uncontrolled thermoelastic stresses that arise in the SOS structure when it is fixed on a membrane made of titanium alloys, which makes it possible to reduce temperature errors and increase the stability and reliability of measurements during long-term operation of the sensor.

EFFECT: production of semiconductor modules with SOS structures.

1 cl, 2 dwg